| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a substrate transfer device (method) for inserting a fork of a conveying arm from a perpendicular direction, so as to transfer a substrate on a roller conveyor to the conveying arm without a lift pin and a lifting mechanism of the lift pin. <P>SOLUTION: The substrate transfer device has a roller conveyor RC1 which conveys a substrate G in the horizontal direction, and a conveying arm 110 which has a fork 101 that moves the substrate in the horizontal and vertical directions and freely rotates it around the vertical axis. The roller conveyor includes a drive roller line formed by attaching drive rollers 56 on a drive shaft 55 at appropriate intervals, and a free roller line formed by attaching a free rollers 59 on a free roller shaft 57 to be freely rotated at appropriate intervals, which are arranged in parallel. The roller conveyer includes a free roller driving cylinder 65 which moves the free roller line to the side of the adjacent drive roller line, so as to form a space I between the drive roller line and the free roller line. The fork of the conveying arm is inserted into the space from the direction perpendicular to the conveying direction, thereby transferring the substrate on a first roller conveyor to the conveying arm. <P>COPYRIGHT: (C)2012,JPO&INPIT |
