| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a heat drying device capable of suppressing unevenness in drying caused on a coated layer. <P>SOLUTION: In this heat drying device including a stage unit for retaining a base and a heater unit for adjusting a base temperature, the stage unit has an ultrasonic wave generating section generating ultrasonic wave, and a vibrating plate section vibrating by receiving the ultrasonic wave. Longitudinal and lateral lengths of the vibrating plate section are longer than longitudinal and lateral lengths of the base, the vibrating plate section incorporates the heater unit, the base positioned above the vibrating plate section is retained in a state of floating from a surface of the vibrating plate section by a prescribed height by vibrating the vibrating plate section, and the base is heated and dried by heating the vibrating plate section to a prescribed temperature by heating the heater unit in the floating state. <P>COPYRIGHT: (C)2012,JPO&INPIT |
