Substrate Processing System, Method Of Confirmation Of Its State Of Use, And Method Of Prevention Of Illicit Use

摘要

[PROBLEMS] To make it possible to ascertain whether a substrate processing apparatus is falsely used or not and to prevent the false use if any. [MEANS FOR SOLVING PROBLEMS] A license file (LF) contains encrypted license information L including the use condition of a substrate processing apparatus on a specific user. A conformity ascertaining program (P2) ascertains the conformity among the content of the license file (LF) decrypted by a decrypting program (P1), apparatus information DI collected from the substrate processing apparatus, network information NI, and the current time CT and ascertains whether there is any false use. If there is any false use, the operation of the substrate processing apparatus is stopped until a control program (P3) takes a predetermined measure according to the information from the conformity ascertaining program (P2).