发明名称 SEMICONDUCTOR DEVICE
摘要 <P>PROBLEM TO BE SOLVED: To provide a semiconductor device capable of improving adhesive strength of micro bumps to a semiconductor element side. <P>SOLUTION: A semiconductor device comprises: a semiconductor element 2 and electrode pads 20 of the semiconductor element; a buffer coat film 40 having openings 41 to expose the electrode pads 20; and micro bumps 50 electrically connected to the electrode pads through the openings. The contact area between each micro bump and a side surface 41b of each opening is larger than that between each micro bump and a bottom surface 60a of each opening. <P>COPYRIGHT: (C)2012,JPO&INPIT
申请公布号 JP2012059738(A) 申请公布日期 2012.03.22
申请号 JP20100198385 申请日期 2010.09.03
申请人 TOSHIBA CORP 发明人 SETO MASAHARU
分类号 H01L21/60;H01L21/3205;H01L23/52 主分类号 H01L21/60
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