THIN FILM TRANSISTOR, ITS MANUFACTURING METHOD, AND DISPLAY DEVICE INCLUDING THE SAME

摘要

PROBLEM TO BE SOLVED: To provide a thin film transistor whose content of metal catalyst remaining in a crystallized semiconductor layer is effectively reduced.

SOLUTION: A thin film transistor, its manufacturing method, and a display device including the same are provided. The thin film transistor comprises: a substrate; a semiconductor layer which is located on the substrate and which is crystallized utilizing metal catalyst; a gate electrode disposed on and insulated from the semiconductor layer; and a gettering layer which is located between the semiconductor layer and the gate electrode and which is formed using a metal oxide with lower diffusion coefficient than the metal catalyst in the semiconductor layer.

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