| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a mask holder which allows conveyance of a plurality of masks positioned to each other. <P>SOLUTION: A mask holder 6 is used in an ion implanter which implants ions into a substrate through an opening 5 formed by superimposing a plurality of masks. The mask holder 6 has a mask insertion port 8 through which the plurality of masks are inserted, a mask housing part 9 provided continuously to the mask insertion port 8, and a through window 7 for exposing the mask which exposes at least a part of the opening to the outside of the mask holder. <P>COPYRIGHT: (C)2012,JPO&INPIT |
