| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an X-ray detection system for collecting a spectrum by diffraction of characteristic X-rays from a sample that has been irradiated with an electron beam, which maintains the detection accuracy of an energy distribution spectrum by being provided with an X-ray condensing mirror for appropriately condensing rays. <P>SOLUTION: The X-ray detection system includes: an electron beam irradiation section for irradiating a sample with an electron beam; an X-ray condensing mirror for condensing characteristic X-rays emitted from the sample that has been irradiated with the electron beam to guide the condensed characteristic X-rays to a diffraction grating; an X-ray condensing mirror adjustment section for adjusting the position or the angle of the X-ray condensing mirror; a diffraction grating for receiving the characteristic X-rays that have been condensed by the X-ray condensing mirror to generate diffracted X rays; and an image sensor for detecting the diffracted X rays that have been generated in the diffraction grating. The X-ray condensing mirror adjustment section adjusts the position or the angle of the X-ray condensing mirror, in a reflectable angle range according to the energy of the characteristic X-rays reflected on a reflecting surface of the X-ray condensing mirror. <P>COPYRIGHT: (C)2012,JPO&INPIT |
