发明名称 |
SUPPORT ELEMENTS FOR AN OPTICAL ELEMENT |
摘要 |
Support elements for an optical element and a method for supporting an optical element are disclosed. The disclosure can be used in connection with arbitrary optical apparatuses or optical imaging methods. In particular, the disclosure can be used in connection with the microlithography employed in the manufacture of microelectronic circuits. |
申请公布号 |
US2012067833(A1) |
申请公布日期 |
2012.03.22 |
申请号 |
US201113071165 |
申请日期 |
2011.03.24 |
申请人 |
KUGLER JENS;WEBER ULRICH;WENGERT NICOLAI;CARL ZEISS SMT GMBH |
发明人 |
KUGLER JENS;WEBER ULRICH;WENGERT NICOLAI |
分类号 |
H05K7/18 |
主分类号 |
H05K7/18 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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