| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an imaging device for applying illumination light emitted from a light source to a part to be observed through an illumination window, which cleans the illumination window at a proper timing even when the illumination light of high power density is used, and efficiently prevents the contamination from sticking to the illumination window. <P>SOLUTION: The imaging device for irradiates the part to be observed with the illumination light emitted from the light source through the illumination window and receives light coming from the part to be observed, for capturing an image. An illumination window cleaning unit discharges a liquid toward the illumination window to clean the illumination window in response to an instruction to start illumination of the illumination light. <P>COPYRIGHT: (C)2012,JPO&INPIT |
