发明名称 SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING THE SAME
摘要 <P>PROBLEM TO BE SOLVED: To provide a semiconductor device including a semiconductor element capable of preventing the occurrence of leakage current between a drain region and a depletion layer due to the segregation of impurity. <P>SOLUTION: A semiconductor device comprises: a semiconductor substrate SUB having a primary surface; a core transistor that is formed on the primary surface and constitutes a logic circuit; and an I/O transistor constituting an input/output circuit. The distance from the primary surface to the bottom of an n-type impurity region NR of an I/O n-type transistor is longer than that from the primary surface to the bottom of the n-type impurity region NR of a core n-type transistor. The distance from the primary surface to the bottom of a p-type impurity region PR of an I/O p-type transistor is longer than that from the primary surface to the bottom of the p-type impurity region PR of a core p-type transistor. The distance from the primary surface to the bottom of the n-type impurity region of the I/O n-type transistor is longer than that from the primary surface to the bottom of the p-type impurity region of the I/O p-type transistor. <P>COPYRIGHT: (C)2012,JPO&INPIT
申请公布号 JP2012059932(A) 申请公布日期 2012.03.22
申请号 JP20100201885 申请日期 2010.09.09
申请人 RENESAS ELECTRONICS CORP 发明人 HIRANO YUICHI
分类号 H01L27/092;H01L21/8238;H01L27/10 主分类号 H01L27/092
代理机构 代理人
主权项
地址