CERAMIC MEMBER, PROBE HOLDER, AND METHOD FOR MANUFACTURING CERAMIC MEMBER

摘要

Provided are a ceramic member being a sintered body including at least forsterite and boron nitride as major components, and in which the boron nitride is oriented in one direction, a probe holder formed by using the ceramic member, and a method for manufacturing the ceramic member. In the ceramic member, the index of orientation preference is equal to or lower than 0.07, and the coefficient of thermal expansion at 20 to 300° C. in a direction parallel to the direction of orientation is (3 to 5)×10−6/° C., or the three-point bending strength based on JIS R 1601 is equal to or higher than 250 MPa.