PATTERNING OF SOLID BODY FEATURE BY DIRECT INPUT NANOLITHOGRAPHIC PRINTING

摘要

PROBLEM TO BE SOLVED: To provide an improved high-resolution direct patterning technology for moving ink to a substrate using a nanoscopic chip.

SOLUTION: A method of this invention for manufacturing an organic/inorganic composite nanostructure on a substrate comprises a step for attaching a liquid having a block copolymer and an inorganic precursor on a substrate by using dip-pen nanolithography. The nanostructure comprises a line having a width/diameter less than 1 micron and/or a dotted array. This invention comprises a device including an inorganic/organic composite nanoscale region having a nanoscale diameter other than height.

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