| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a particulate substance detector which has simple structure and can detect a particulate substance with high accuracy. <P>SOLUTION: A particulate substance detector 100 includes: an element base 31 which shows the tabular shape and on one surface of which a recess 32 for performing dust collection of the particulate substance is formed; a pair of measurement electrodes 12a and 12b arranged on the bottom surface side of the recess 32 of the element base 31; and a high voltage dust collection electrode 41 arranged inside a wall 45 forming the recess 32 of the element base 31 on the one surface side rather than positions where the pair of measurement electrodes 12a and 12b are arranged. The detector detects the particulate substance to which the dust collection is performed on the side of a bottom surface 32a of the recess 32 by generating an electric field from the high voltage dust collection electrode 41 toward the pair of measurement electrodes 12a and 12b, performing the dust collection of the particulate material contained in gas for measurement flowing on the element base 31 on the side of the bottom surface 32a of the recess 32, and measuring change of electric characteristics in the pair of measurement electrodes 12a and 12b. <P>COPYRIGHT: (C)2012,JPO&INPIT |
