发明名称 NONVOLATILE SEMICONDUCTOR MEMORY DEVICE AND METHOD FOR MANUFACTURING THE SAME
摘要 According to one embodiment, a nonvolatile semiconductor memory device includes a memory region and a non-memory region. The memory region includes a stacked structural body, a semiconductor pillar, a memory layer, an inner insulating film and an outer insulating film. The stacked structural body includes a plurality of electrode films stacked alternately along a first direction with a plurality of inter-electrode insulating films. The semiconductor pillar pierces the stacked structural body in the first direction. The memory layer is provided between the semiconductor pillar and each of the plurality of electrode films. The inner insulating film is provided between the memory layer and the semiconductor pillar. The outer insulating film is provided between the memory layer and each of the plurality of electrode films. The non-memory region is provided with the memory region along a second direction orthogonal to the first direction. The non-memory region includes an insulating part.
申请公布号 US2012068253(A1) 申请公布日期 2012.03.22
申请号 US201113052161 申请日期 2011.03.21
申请人 OOTA SHIGETO;KIDOH MASARU;AOCHI HIDEAKI;KABUSHIKI KAISHA TOSHIBA 发明人 OOTA SHIGETO;KIDOH MASARU;AOCHI HIDEAKI
分类号 H01L29/78;H01L21/28 主分类号 H01L29/78
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