发明名称 ELECTRICALLY CONDUCTIVE ADHESIVE FOR TEMPORARY BONDING
摘要 The present disclosure relates to the field of fabricating microelectronic devices, wherein a conductive adhesive is used as a temporary microelectronic wafer bonding adhesive to prevent damage to microelectronic devices resulting from electrical charge build-up on the microelectronic devices during the formation of through-silicon vias.
申请公布号 US2012068342(A1) 申请公布日期 2012.03.22
申请号 US20100883552 申请日期 2010.09.16
申请人 LEE KEVIN J. 发明人 LEE KEVIN J.
分类号 H01L23/532;H01L21/768 主分类号 H01L23/532
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