SCANNER DEVICE AND APPARATUS FOR MEASURING THREE-DIMENSIONAL SHAPE OF OBJECT

摘要

PROBLEM TO BE SOLVED: To project a linear pattern using a coherent light source, while restricting generation of speckle in a projection surface.

SOLUTION: Laser beam L50 is reflected by an optical beam scanner device 60 to be radiated on a hologram recording medium 45. On the hologram recording medium 45, an image 35 of a linear scatterer is recorded as a hologram using reference light focused on scanning reference point B. The optical beam scanner device 60 refracts the laser beam L50 at the scanning reference point B to be radiated on the hologram recording medium 45. At this moment, refraction state of the laser beam is changed in time so as to change a radiation position of the refracted laser beam L60 with respect to the hologram recording medium 45 in time. Diffraction light L45 from the hologram recording medium 45 generates a reconstructed image 35 of a linear scatterer on a light receiving surface R of a stage 210. When an object is placed on the light receiving surface R, a linear pattern is projected by hologram reconstructing light to image a projection image to measure a three-dimensional shape of the object.

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