| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a signal measurement apparatus which performs a timing adjustment for storing data obtained by sampling and converting analog signals through a plurality of A/D converters with different conversion properties with the same timing in a memory with the same timing, a signal measurement system and a semiconductor testing device. <P>SOLUTION: A signal measurement apparatus for converting an analog signal outputted from a target to be measured into a digital signal and measuring the digital signal includes: a plurality of conversion sections 20a and 20b of which the conversion properties for converting analog signals into the digital signals are different from each other; a thinning section 37b for thinning converted data which is converted by the conversion sections; storage sections 33a and 33b for storing the data converted by the conversion sections and the data thinned by the thinning section; and an adjustment section 38b for matching the timing to store the data sampled and converted by the conversion sections and the data sampled and converted with the same timing as the data and then thinned by the thinning section in the storage sections on the basis of a sampling clock term of the conversion sections and a thinning interval of the thinning section. <P>COPYRIGHT: (C)2012,JPO&INPIT |
