| 摘要 |
<P>PROBLEM TO BE SOLVED: To efficiently decompose hydrogen peroxide contained in a copper etching waste liquid at high concentration. <P>SOLUTION: There is provided a method for treating a copper etching waste liquid by adjusting the pH of the waste liquid containing hydrogen peroxide to 4 or more. When the pH of the copper etching waste liquid which has usually pH 3 or less being a strongly acidic liquid is adjusted to 4 or more, a copper-containing SS is generated, and the SS functions as a decomposition catalyst for hydrogen peroxide. Thus, the hydrogen peroxide in the copper etching waste liquid can be efficiently decomposed by only adjusting the pH of the waste liquid to 4 or more without needing dilution or heating nor needing any chemical agent other than an alkaline agent for pH adjustment. <P>COPYRIGHT: (C)2012,JPO&INPIT |
