| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an on-machine measuring device for a laser beam machine using weak light of a light source for laser beam machining for a light source for measurement. <P>SOLUTION: The on-machine measuring device includes a stage 6 for the on-machine measuring device provided freely movably on a pedestal. The stage 6 for the on-machine measuring device includes: spectroscopic means for dispersing weak continuous light and attaining a reference optical axis and a positioning mechanism 2 for positioning the on-machine measuring device by the reference optical axis; and spectroscopic means 4 and 5 for dispersing reflected light from a machining object 7 of the weak continuous light and a displacement detection mechanism 3 for detecting the displacement of the surface shape of the machining object by the dispersed reflected light. During machining, the stage 6 for the on-machine measuring device is moved to withdraw both the spectroscopic means 4 and 5 from a laser beam for machining. During measurement, the stage 6 for the on-machine measuring device is moved, the stage 6 for the on-machine measuring device is positioned to an irradiation optical axis by the positioning mechanism 2 by using the reference optical axis from the weak continuous light, and the displacement of the surface shape of the machining object 7 is detected by the displacement detection mechanism 3. <P>COPYRIGHT: (C)2012,JPO&INPIT |
