| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a pattern for foreign matter detection which can detect existence of foreign matters with high efficiency regardless of the type of foreign matters, and to provide a semiconductor device having such a pattern for foreign matter detection. <P>SOLUTION: The pattern for foreign matter detection has a plurality of L-shaped patterns which are formed on a substrate and from which corners are removed. The plurality of L-shaped patterns from which corners are removed are arranged with a space between one other so that the positions of the removed corners are arranged on a line. <P>COPYRIGHT: (C)2012,JPO&INPIT |
