发明名称 DIE BONDER AND DIE-BONDING METHOD
摘要 <P>PROBLEM TO BE SOLVED: To provide a die bonder that improves the pickup accuracy and productivity. <P>SOLUTION: A die bonder and a die-bonding method include an image processing apparatus in which a transfer tool 403 is rotated by a rotation mechanism 408 by a predetermined rotation angle, the bottom surface of the transfer tool 403 is photographed by a camera 405 per rotation angle, the rotation center of the transfer tool 403 is calculated from the photographed image and the deviation amount &theta; per rotation angle is registered in a database, the position correction for the transfer tool 403 is performed based on the database each time a semiconductor chip 402 is mounted on a work 404. <P>COPYRIGHT: (C)2012,JPO&INPIT
申请公布号 JP2012059933(A) 申请公布日期 2012.03.22
申请号 JP20100201891 申请日期 2010.09.09
申请人 HITACHI HIGH-TECH INSTRUMENTS CO LTD 发明人 HORIUCHI AYAJI;KOBASHI HIDEHARU
分类号 H01L21/52 主分类号 H01L21/52
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