| 摘要 |
PURPOSE: An apparatus for measuring the surface properties of a composite sample using the principles of an interferometer and a two-dimensional reflectometer is provided to obtain detailed information of a composite sample by selectively using the principles of an interferometer and a reflectometer. CONSTITUTION: An apparatus(100) for measuring the surface properties of a composite sample using the principles of an interferometer and a two-dimensional reflectometer comprises a light source(101), a collimator(104), a filter unit(120), a first beam splitter(105), an interference lens unit(130), a reflective light lens unit(140), an objective lens mounting unit(106), an imaging lens(108), and a detector(109). The light source generates measurement light. The collimator collimates the light. The beam splitter switches the direction of the collimated light toward an object lens unit. The interference lens unit generates interference light. The reflective light lens unit generates reflective light. The imaging lens concentrates the interference light and the reflective light. The detector detects the concentrated interference light or reflective light. |
