SURFACE EVALUATION METHOD OF ATTRACTION RETAINER

摘要

PROBLEM TO BE SOLVED: To provide a surface evaluation method of an attraction retainer which can perform quantitative evaluation of a defective part inherent in a surface region of a principal surface of the attraction retainer onto which an object is to be attracted.

SOLUTION: In a method of evaluating the surface of a principal surface of an attraction retainer onto which an object is to be attracted, surface evaluation of the principal surface is performed based on images of interference patterns in the principal surface obtained using a laser microscope.

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