| 摘要 |
<P>PROBLEM TO BE SOLVED: To improve film tension of a pellicle film without applying temperature change. <P>SOLUTION: The manufacturing method of a pellicle comprises: a first step of pasting a pellicle film 11 which is deposited on a substrate 30 and is formed of high polymer material to a frame body 20 having an opening so as to cover the opening surface; a second step of peeling the pellicle film 11 pasted on the frame body 20 from the substrate 30; and a third step of pasting the pellicle film 11 on the frame body 20 to a pellicle frame 10 having an opening so as to cover the opening surface; in this order. At the first step, external force toward the inside of the frame body 20 is applied to at least one side of the frame body 20, and then the pellicle film 11 is pasted to the frame body 20 in a state where the side of the frame body 20 is deformed to the inside. <P>COPYRIGHT: (C)2012,JPO&INPIT |
