| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a manufacturing method of a vibrator capable of manufacturing a vibrator stably, a vibrator and an oscillator. <P>SOLUTION: When a vibrator is manufactured, included is a processing where a substrate and a vibration plate are joined, and a surface of the vibration plate joined to the substrate is polished, and an electrode is formed on a surface of the polished vibration plate, and an area of the substrate corresponding to the formed electrode is etched selectively in a surface of the opposite side of the surface to which the vibration plate is joined. The manufactured vibrator comprises: the substrate where a recessed part is provided in one surface; the vibration plate joined to an area corresponding to the recessed part on a surface of the opposite side of the surface with the recessed part of the substrate; and the electrode provided on the vibration plate. A bottom area of the recessed part of the substrate functions as a counter electrode which opposes the electrode by being made to be conductive. <P>COPYRIGHT: (C)2012,JPO&INPIT |
