发明名称 SURFACE ACOUSTIC WAVE DEVICE, ELECTRONIC APPARATUS AND SENSOR DEVICE
摘要 <P>PROBLEM TO BE SOLVED: To provide an SAW device for simultaneously realizing excellent frequency temperature characteristics and a high Q value within an operational temperature range. <P>SOLUTION: On a main surface of a crystal substrate 12 having Euler angles of (-1.5&deg;&le;&phiv;&le;1.5&deg;, 117&deg;&le;&theta;&le;142&deg; and 42.79&deg;&le;¾&psi;¾&le;49.57&deg;), an SAW device 11 has: an IDT 13 for exciting an SAW of an upper limit mode of a stop band; a pair of reflectors 14 disposed at both ends thereof; inter-electrode-finger grooves 17 recessed between electrode fingers 15a and 15b of the IDT 13; and inter-conductor-strip grooves 18 recessed between conductor strips 14a of the pair of reflectors 14. A first direction (X' axis) perpendicular to the electrode fingers 15a and 15b and the conductor strips 14a and an electrical machinery axis (X axis) of the crystal substrate 12 intersect at the angle of &psi;. At least one part of the IDT 13 and the pair of reflectors 14 is disposed in a second direction intersecting with the first direction at the angle of &alpha; satisfying the following relation: 1.0&deg;&le;&alpha;&le;2.75&deg;. <P>COPYRIGHT: (C)2012,JPO&INPIT
申请公布号 JP2012060418(A) 申请公布日期 2012.03.22
申请号 JP20100201749 申请日期 2010.09.09
申请人 SEIKO EPSON CORP 发明人 YAMANAKA KUNIHITO
分类号 H03H9/145;H03H9/25 主分类号 H03H9/145
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