| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a light deflector in which variation of resonant frequency due to environment temperature or the like can be adjusted. <P>SOLUTION: A light deflector includes a fixed base 60, a mirror 10 having a light reflection surface, an elastic support member 20 for swingably supporting the mirror 10, and a pair of vibrating beams 50 in which one end is connected to the fixed base 60, the other end is connected to the elastic support member 20, and a piezoelectric member is fixed to a beam-like member. The vibrating beam 50 is composed of a driving beam 30 that generates a torsional deformation in the elastic support member 20 to make the mirror 10 rotationally vibrate in a desired resonant frequency, by being applied with an AC voltage; and a frequency adjusting beam 40 that adjusts the resonant frequency by applying stress to the elastic support member 20. <P>COPYRIGHT: (C)2012,JPO&INPIT |
