| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a molded product that comprises a composition containing a fluorine-containing elastomer with reduced metal content. <P>SOLUTION: The molded product is obtained from the composition containing the fluorine-containing elastomer having the metal content of 50 ppm or less and has a metal content of 50 ppm or less. The molded product is useful as a sealing material or the like for semiconductor manufacturing apparatus. <P>COPYRIGHT: (C)2012,JPO&INPIT |
