| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a different type inclusion test method and a test device having high detection capability of a different type inclusion. <P>SOLUTION: The different type inclusion test method selects an area to be tested having a characteristic pattern from patterns of an object to be tested, acquires a luminance value of a plurality of pixels in the area to be tested as a master data luminance value in advance, calculates normalized correlation coefficients of the master data luminance value and the luminance values of the plurality of pixels in the object to be tested which are determined to be a regular type or a different type over all image areas of the object to be tested, determines that an area of the largest normalized correlation coefficient matches the test area for which master data is acquired, decides the object to be tested as a regular type when the value of the largest normalized correlation coefficient is equal to or larger than a preset threshold, and decides the object to be tested as a different type when the value is equal to or smaller than the threshold. <P>COPYRIGHT: (C)2012,JPO&INPIT |
