ELECTRO-ACTIVE MICROELECTROMECHANICAL DEVICE AND CORRESPONDING DETECTION PROCESS

摘要

Electroactive microelectromechanical device of the Artificial Hair Cell type, comprising a moving cilium structure including a substrate (11, 12; 42) and a cantilever (18; 48), partly or entirely in.piezoelectric material, subject to bending or deformation following the action of a force and/or an applied voltage (Vapp1), said cantilever (18; 48) comprising a multilayer (13, 14a, 14b, 16) inducing a stress-driven geometry in which a portion (19) of said cantilever (18; 48) lies outside of a plane defined by the substrate (11, 12; 42). According to the invention said cantilever (18; 48) is associated to a piezoresistive element, in particular of piezoresistive material (15) configured to measure the bending or deformation of said cantilever (18; 48).