发明名称 Evaporation boat for vacuum vapor deposition and vacuum vapor deposition system
摘要 Evaporation boat (20) comprising a source material container (201) configured to contain source material (204) and provided with an opening; a cover plate (202) disposed, with a predetermined gap (d), above the opening of the source material container (201), wherein the vertical projection of the cover plate (202) covers the opening of the source material container (201), so that the scattering range of the source material vapor formed by evaporating the source material is controlled by the cover plate (202) as the source material vapor scatters through the predetermined gap (d) to the outside of the evaporation boat; and a supporting member (203) connecting the source material container (201) and the cover plate (202) to maintain a predetermined gap (d) therebetween.
申请公布号 EP2431493(A1) 申请公布日期 2012.03.21
申请号 EP20110179608 申请日期 2011.08.31
申请人 PRINCO CORP. 发明人 SHIH, YING-CHE
分类号 C23C14/24 主分类号 C23C14/24
代理机构 代理人
主权项
地址