摘要 |
Evaporation boat (20) comprising a source material container (201) configured to contain source material (204) and provided with an opening; a cover plate (202) disposed, with a predetermined gap (d), above the opening of the source material container (201), wherein the vertical projection of the cover plate (202) covers the opening of the source material container (201), so that the scattering range of the source material vapor formed by evaporating the source material is controlled by the cover plate (202) as the source material vapor scatters through the predetermined gap (d) to the outside of the evaporation boat; and a supporting member (203) connecting the source material container (201) and the cover plate (202) to maintain a predetermined gap (d) therebetween. |