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发明名称
ION IMPLANTING APPARATUS AND METHOD FOR COORDINATING BEAM CURRENT DENSITY DISTRIBUTION
摘要
申请公布号
KR101122823(B1)
申请公布日期
2012.03.21
申请号
KR20100121490
申请日期
2010.12.01
申请人
发明人
分类号
H01J37/317;H01L21/265
主分类号
H01J37/317
代理机构
代理人
主权项
地址
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