| 摘要 |
<p>The device has a housing (1) for enclosing a closed space (2) in all directions, where the space is provided with a lockable aperture for introduction and/or output of a planar substrate (4). A handling equipment comprises a main plane (8) and a drive (9) i.e. servomotor, for displacement of the plane toward a surface normal of the plane. The plane is arranged within the closed space, so that drive displaces the plane outside of the closed space. Another handling equipment includes a drive (9') for displacing a counter plane (8'), which faces the main plane.</p> |
