POLYMER PRODUCTION METHOD, POLYMER FOR USE IN LITHOGRAPHY, RESIST COMPOSITION AND SUBSTRATE PRODUCTION METHOD

摘要

A copolymer obtained by polymerizing two or more types of monomers, wherein among fractions obtained by dividing an eluate showing peaks relative to the copolymer, in an elution curve obtained by gel permeation chromatography (GPC), into eight fractions in order of fractionation, such that each fraction has the same volume, a difference between a monomer composition ratio of a copolymer contained in a first eluted fraction and a monomer composition ratio of all copolymers is -3 mol % to +3 mol % in any of the constitutional units derived from the respective monomers.