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发明名称
Method of correcting chromatic aberrations in charged particle beam and charged particle beam systems
摘要
申请公布号
EP1635373(B1)
申请公布日期
2012.03.21
申请号
EP20050255626
申请日期
2005.09.14
申请人
JEOL LTD.
发明人
UNO, SHINOBU
分类号
H01J37/153;H01J37/22;H01J37/28
主分类号
H01J37/153
代理机构
代理人
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