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发明名称
FILM FORMING APPARATUS
摘要
申请公布号
KR101125086(B1)
申请公布日期
2012.03.21
申请号
KR20097022401
申请日期
2008.04.15
申请人
发明人
分类号
H01L21/205;C23C16/455;H01L21/285
主分类号
H01L21/205
代理机构
代理人
主权项
地址
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