ION SOURCE HAVING A UNIFORM RADIAL DENSITY

摘要

The source comprises an ionization chamber into which the gas to be ionized is introduced, a cathode placed at the center of an intermediate electrode provided within an orifice for the passage of electrons, an anode provided with a hole for the passage of ions, a plasma-expansion control electrode which is electrically insulated from the anode and brought to a negative potential with respect to the anode potential, and an ion extraction electrode.