METHOD OF ETCHING NICKEL SILICIDE AND METHOD OF FORMING CONDUCTIVE LINES,申请号EP20060770811-传众专利搜索

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发明名称	METHOD OF ETCHING NICKEL SILICIDE AND METHOD OF FORMING CONDUCTIVE LINES
摘要
申请公布号	EP1891665(B1)	申请公布日期	2012.03.21
申请号	EP20060770811	申请日期	2006.05.19
申请人	MICRON TECHNOLOGY, INC.	发明人	RAGHU, PRASHANT
分类号	H01L21/3213	主分类号	H01L21/3213
代理机构		代理人
主权项
地址

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