发明名称 |
Isotopically-enriched boron-containing compounds, and methods of making and using same |
摘要 |
An isotopically-enriched, boron-containing compound comprising two or more boron atoms and at least one fluorine atom, wherein at least one of the boron atoms contains a desired isotope of boron in a concentration or ratio greater than a natural abundance concentration or ratio thereof. The compound may have a chemical formula of B2F4. Synthesis methods for such compounds, and ion implantation methods using such compounds, are described, as well as storage and dispensing vessels in which the isotopically-enriched, boron-containing compound is advantageously contained for subsequent dispensing use. |
申请公布号 |
US8138071(B2) |
申请公布日期 |
2012.03.20 |
申请号 |
US20100913721 |
申请日期 |
2010.10.27 |
申请人 |
KAIM ROBERT;SWEENEY JOSEPH D.;BYL OLEG;YEDAVE SHARAD N.;JONES EDWARD E.;ZOU PENG;TANG YING;CHAMBERS BARRY LEWIS;RAY RICHARD S.;ADVANCED TECHNOLOGY MATERIALS, INC. |
发明人 |
KAIM ROBERT;SWEENEY JOSEPH D.;BYL OLEG;YEDAVE SHARAD N.;JONES EDWARD E.;ZOU PENG;TANG YING;CHAMBERS BARRY LEWIS;RAY RICHARD S. |
分类号 |
H01L21/26;H01L21/42 |
主分类号 |
H01L21/26 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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