发明名称 Pickup device and pickup method
摘要 It is an object of the present invention to provide a device which can pick up a chip from an adhesive film while preventing damage to the chip. In addition, a device which can pick up a chip over an adhesive film with a high yield is provided. A pickup device includes: a frame for holding a film to which a chip is attached, which is fixed to a support; a pressing jig which presses a surface of the film, to which a chip is not attached, while rotated or moved; a holding jig which holds the chip simultaneously with or after the pressing jig pressing the film; and a moving unit which moves the holding jig.
申请公布号 US8137050(B2) 申请公布日期 2012.03.20
申请号 US20060524071 申请日期 2006.09.20
申请人 YAMADA DAIKI;KUSUMOTO NAOTO;SEMICONDUCTOR ENERGY LABORATORY CO., LTD. 发明人 YAMADA DAIKI;KUSUMOTO NAOTO
分类号 H01L29/40 主分类号 H01L29/40
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