发明名称 |
THIN FILM THICKNESS MEASUREMENT USING MULTICHANNEL INFRARED SENSOR |
摘要 |
A system and method for analyzing the characteristics of a thin film is provided. The current invention extends the capability of IR sensors to measure thin films through configuring a plurality of detection channels with appropriately chosen filters. With the multichannel infrared sensor, the characteristic signature of interference fringes can be detected simultaneously with, or instead, of absorption-based measurements.
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申请公布号 |
CA2563777(C) |
申请公布日期 |
2012.03.20 |
申请号 |
CA20052563777 |
申请日期 |
2005.04.22 |
申请人 |
HONEYWELL INTERNATIONAL INC. |
发明人 |
GERMANENKO, IGOR N.;AXELROD, STEVE |
分类号 |
G01B11/06 |
主分类号 |
G01B11/06 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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