| 摘要 |
<p>PURPOSE: A semiconductor equipment diagnosis system and a method thereof are provided to analyze a signal transmitted from a light tower installed on semiconductor equipment, thereby enabling malfunction diagnosis. CONSTITUTION: A signal analyzing apparatus(220) analyzes a signal which is received from a light tower(LT) which displays a condition of each semiconductor equipment. An LT monitoring server(240) displays the condition of each semiconductor equipment by receiving the signal from the signal analyzing apparatus. The LT monitoring server transmits malfunction information to a remote user terminal. The remote user terminal(260) displays the malfunction information by receiving the malfunction information from the LT monitoring server. The remote user terminal includes an exclusive window gadget program for receiving a malfunction device signal from the LT monitoring server.</p> |
