发明名称 Semiconductor device with an electrode as an alignment mark, and method of manufacturing the same
摘要 A semiconductor device includes a semiconductor substrate, a back side drawn electrode formed by embedding a first conductive material in a contact hole penetrating the semiconductor substrate through an insulating film formed to include a uniform thickness, used also as an alignment mark, and configured to draw out an electrode to the back side of the semiconductor substrate. The device further includes a pad provided on the back side of the semiconductor substrate, and connected to the back side drawn electrode.
申请公布号 US8138533(B2) 申请公布日期 2012.03.20
申请号 US20090638381 申请日期 2009.12.15
申请人 KOIKE HIDETOSHI;KOHYAMA YUSUKE;KABUSHIKI KAISHA TOSHIBA 发明人 KOIKE HIDETOSHI;KOHYAMA YUSUKE
分类号 H01L31/14 主分类号 H01L31/14
代理机构 代理人
主权项
地址