发明名称 MASK FOR FORMING OF BUMP AND METHOD OF MANUFACTURING THE SAME
摘要 PURPOSE: A mask for forming of bump and a method of manufacturing the same are provided to increase the convexity of a pump by including an opening having a larger upper part than a lower part. CONSTITUTION: A first mask layer(110) comprises a plurality of first openings(111) passing through a body. A second mask layer(120) is formed at the upper part of the first mask layer. The second mask layer comprises a plurality of second openings(121) passing through the body. A third mask layer(130) is formed at the lower part of the first mask layer. The third mask layer comprises a third opening(131) passing through the body.
申请公布号 KR20120026815(A) 申请公布日期 2012.03.20
申请号 KR20100088951 申请日期 2010.09.10
申请人 SAMSUNG ELECTRO-MECHANICS CO., LTD. 发明人 HWANG, JUN OH;MOK, JEE SOO
分类号 H01L23/488 主分类号 H01L23/488
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