发明名称 |
MASK FOR FORMING OF BUMP AND METHOD OF MANUFACTURING THE SAME |
摘要 |
PURPOSE: A mask for forming of bump and a method of manufacturing the same are provided to increase the convexity of a pump by including an opening having a larger upper part than a lower part. CONSTITUTION: A first mask layer(110) comprises a plurality of first openings(111) passing through a body. A second mask layer(120) is formed at the upper part of the first mask layer. The second mask layer comprises a plurality of second openings(121) passing through the body. A third mask layer(130) is formed at the lower part of the first mask layer. The third mask layer comprises a third opening(131) passing through the body.
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申请公布号 |
KR20120026815(A) |
申请公布日期 |
2012.03.20 |
申请号 |
KR20100088951 |
申请日期 |
2010.09.10 |
申请人 |
SAMSUNG ELECTRO-MECHANICS CO., LTD. |
发明人 |
HWANG, JUN OH;MOK, JEE SOO |
分类号 |
H01L23/488 |
主分类号 |
H01L23/488 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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