RADIO FREQUENCY DEVICE AND METHOD OF FABRICATING THE SAME
摘要
PURPOSE: A radio frequency device and a method of fabricating the same are provided to reduce the contact resistance of a guard ring contact plug by forming an impurity doping region in the surface of the guard ring. CONSTITUTION: A substrate(102) comprises a first area(102a) and a second part(102b). A semiconductor layer(106) is formed on the first area of the substrate. A buried insulating layer(104) is formed between the substrate and the semiconductor layer. A plurality of inversion blocking layers(120a) is formed on the second region of the substrate. A field insulating layer(125) covers the side of the semiconductor layer and the top side of the inversion blocking layer.
申请公布号
KR20120026670(A)
申请公布日期
2012.03.20
申请号
KR20100088688
申请日期
2010.09.10
申请人
KOREA ADVANCED INSTITUTE OF SCIENCE AND TECHNOLOGY
发明人
KIM, HAN HEUNG;LIM, BU TAEK;LEE, KEE SUNG;YU, DONG EUN;LEE, DONG WOOK;KANG, MIN HO;LEE, BYUNG JOO