СПОСОБ НАНЕСЕНИЯ ПОЛИИМИДНОГО ПОКРЫТИЯ НА ПОДЛОЖКУ,申请号SU19894772816-传众专利搜索

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发明名称	СПОСОБ НАНЕСЕНИЯ ПОЛИИМИДНОГО ПОКРЫТИЯ НА ПОДЛОЖКУ
摘要
申请公布号	RU1786963(C)	申请公布日期	2012.03.20
申请号	SU19894772816	申请日期	1989.12.22
申请人	Специальное конструкторско-технологическое бюро с опытным производством Института физики твердого тела и полупроводников АН БССР	发明人	Коршунов Ф.П.;Кульгачев В.И.;Сенько С.Ф.;Воробьев О.А.;Снитовский Ю.П.
分类号	H01L21/22	主分类号	H01L21/22
代理机构		代理人
主权项
地址

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