发明名称 Method and apparatus for measuring optical extinction in a thin film during its deposition
摘要 A method of measuring the extinction of light in a coating including the steps of: directing a light beam to a substrate to be coated at an angle of incidence for which the beam undergoes nominal total internal reflection; depositing a coating on the substrate such that the light beam will be waveguided in the coating thus reducing internal reflection for a period of deposition time; measuring a reduction of the internal reflection during deposition; and calculating an extinction value of the light beam in the deposited layer corresponding to the measured drop in internal reflection.
申请公布号 US8139234(B2) 申请公布日期 2012.03.20
申请号 US20060553396 申请日期 2006.10.26
申请人 DUBE GEORGE 发明人 DUBE GEORGE
分类号 G01B11/06 主分类号 G01B11/06
代理机构 代理人
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