发明名称 Method for forming laminated structure and method for manufacturing semiconductor device using the method thereof
摘要 A method for manufacturing a semiconductor device includes the steps of (a) preparing a wafer including a first circuit formation region and a first surrounding region, (b) laminating a first chip on the first circuit formation region, (c) pouring a first underfill into a first space between the first circuit formation region and the first chip from the first surrounding region, (d) hardening the first underfill, (e) forming a laminated structure comprised of a first chip block that includes a second chip including the first circuit formation region, the first chip, and the first underfill by conducting dicing with respect to the wafer; and (f) laminating the laminated structure on a substrate.
申请公布号 US8138023(B2) 申请公布日期 2012.03.20
申请号 US20060276828 申请日期 2006.03.15
申请人 EGAWA YOSHIMI;LAPIS SEMICONDUCTOR CO., LTD. 发明人 EGAWA YOSHIMI
分类号 H01L21/00;H01L21/44 主分类号 H01L21/00
代理机构 代理人
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