发明名称 |
METHOD FOR ELECTROMAGNETIC CASTING OF SILICON INGOT |
摘要 |
PURPOSE: A method for electromagnetic casting of a silicon ingot is provided to increase concentration of oxygen and carbon in molten silicon by maintaining the pressure of the chamber lower pressure than normal pressure. CONSTITUTION: An inert gas inlet hole(5) guides an inert gas to a chamber. An inert gas guide tube is contacted to the inert gas inlet hole. A discharge pipe(16) is connected to the chamber to discharge ambient gas from the chamber. A pressure adjustment valve(19) is arranged between a discharge pipe and a vacuum pump(18). The pressure within the chamber is controlled by controlling the discharge amount of the ambient gas.
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申请公布号 |
KR20120026431(A) |
申请公布日期 |
2012.03.19 |
申请号 |
KR20100128863 |
申请日期 |
2010.12.16 |
申请人 |
SUMCO CORPORATION |
发明人 |
NAITOU NOBUMASA;MIYAMOTO SHINICHI;KOYA HIROSHI |
分类号 |
C30B29/06;C01B33/021;C30B11/00;H01L21/02 |
主分类号 |
C30B29/06 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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