发明名称 MOLDING APPARATUS OF FLEXIBLE MEMBRANE FOR HEAD OF CHEMICAL-MECHANICAL POLISHER
摘要 PURPOSE: A molding apparatus of flexible membrane for the head of a chemical-mechanical polisher is provided to reduce manufacturing costs for a product by preventing unnecessary labor costs. CONSTITUTION: A plurality of molds comprises a first molding path corresponding to the shape of a plurality of members. The plural molds are arranged in the inner side of a mold case and are separated from each other. The mold comprises a core mold(14) and a plurality of extraction molds(11,12,13) A closed block(15) closes one side of the molds. A differential extraction unit includes a plurality of moving plates(21,22,23) and a plurality of loads.
申请公布号 KR20120026330(A) 申请公布日期 2012.03.19
申请号 KR20100088485 申请日期 2010.09.09
申请人 RION CO., LTD. 发明人 PARK, KI WOONG;CHUNG, KU CHAN
分类号 H01L21/304 主分类号 H01L21/304
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